Least-squares method constrained by phase smoothness for correcting illumination fluctuation errors in phase-shifting profilometry

被引:6
|
作者
Zhu, Huijie [1 ]
Guo, Hongwei [1 ]
机构
[1] Shanghai Univ, Dept Precis Mech Engn, Lab Appl Opt & Metrol, Shanghai 200444, Peoples R China
基金
中国国家自然科学基金;
关键词
MEASUREMENT SYSTEM; ALGORITHM;
D O I
10.1364/AO.505327
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Phase-shifting fringe projection profilometry usually suffers from the errors induced by illumination fluctuations. As a result, ripple-like artifacts that have the same periods as fringes appear on the phase map. Because the illumination fluctuations cannot be simply modeled using fringe harmonics, their induced errors are difficult to remove by use of a phase-shifting algorithm. To solve this problem, this paper suggests a least-squares method constrained by phase smoothness. This method calculates fringe phases using the generalized phase-shifting algorithm and estimates coefficients related to illumination fluctuation by use of smoothed phase map. Alternately implementing these two steps enables one to eliminate effects of illumination fluctuations on the measurement results. Experimental results demonstrate that this proposed algorithm is helpful for improving measurement accuracy. (c) 2023 Optica Publishing Group
引用
收藏
页码:8451 / 8461
页数:11
相关论文
共 50 条
  • [41] Two-Step Random Phase Shifting Algorithms Based on Fast Least-Squares Method
    Zhang Y.
    Guangxue Xuebao/Acta Optica Sinica, 2021, 41 (03):
  • [42] Weighted least-squares estimation of phase errors for SAR/ISAR autofocus
    Ye, W
    Yeo, TS
    Bao, Z
    IEEE TRANSACTIONS ON GEOSCIENCE AND REMOTE SENSING, 1999, 37 (05): : 2487 - 2494
  • [43] Directly recognizing and removing the projector nonlinearity errors from a phase map in phase-shifting fringe projection profilometry
    Xing, Shuo
    Guo, Hongwei
    OPTICS COMMUNICATIONS, 2019, 435 : 212 - 220
  • [44] Two-step phase extraction and random phase shift estimation in phase-shifting profilometry based on least-squared optical flow method
    Zhu, Jinjin
    Wu, Yuxiang
    Shao, Xiaopeng
    OPTICS COMMUNICATIONS, 2021, 499
  • [45] A Weighted Least-Squares Algorithm for Wrapped Phase Retrieval in Sinusoidal Fringe Projection Profilometry
    Li, Zhihu
    Chen, Rui
    Wu, Dan
    Zhang, Jiwen
    Wang, Guolei
    Xie, Ying
    Xu, Jing
    IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT, 2023, 72
  • [46] Illumination-invariant phase-shifting algorithm for three-dimensional profilometry of a moving object
    Deng, Fuqin
    Liu, Chang
    Sze, Wuifung
    Deng, Jiangwen
    Fung, Kenneth S. M.
    Leung, Winghong
    Lam, Edmund Y.
    OPTICAL ENGINEERING, 2012, 51 (09)
  • [47] Using higher steps phase-shifting algorithms and linear least-squares fitting in white-light scanning interferometry
    Shen, Ming-Hsing
    Hwang, Chi-Hung
    Wang, Wei-Chung
    OPTICS AND LASERS IN ENGINEERING, 2015, 66 : 165 - 173
  • [48] Two-step blind phase-shifting interferometry based on the extreme value of interference and least-squares iterative algorithm
    Xu, Xiaoqing
    Xie, Ming
    Ji, Ying
    Wang, Yawei
    OPTICA APPLICATA, 2021, 51 (04) : 513 - 527
  • [49] An effective method in calibrating nonlinear errors for phase-shifting interferometry
    Li, Zhuo
    Lu, Xiaoxu
    OPTIK, 2014, 125 (09): : 2109 - 2112
  • [50] Application of Phase-Shifting and Focal-Switching Method in Modulation Measurement Profilometry
    Lu Yongyi
    Zhong Min
    Zhao Xu
    Wang Jiahui
    Zhang Xueqin
    Li Min
    Gan Yaowei
    Dai Xianglin
    Huang Kaizhi
    ACTA OPTICA SINICA, 2022, 42 (15)