Least-squares method constrained by phase smoothness for correcting illumination fluctuation errors in phase-shifting profilometry

被引:6
|
作者
Zhu, Huijie [1 ]
Guo, Hongwei [1 ]
机构
[1] Shanghai Univ, Dept Precis Mech Engn, Lab Appl Opt & Metrol, Shanghai 200444, Peoples R China
基金
中国国家自然科学基金;
关键词
MEASUREMENT SYSTEM; ALGORITHM;
D O I
10.1364/AO.505327
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Phase-shifting fringe projection profilometry usually suffers from the errors induced by illumination fluctuations. As a result, ripple-like artifacts that have the same periods as fringes appear on the phase map. Because the illumination fluctuations cannot be simply modeled using fringe harmonics, their induced errors are difficult to remove by use of a phase-shifting algorithm. To solve this problem, this paper suggests a least-squares method constrained by phase smoothness. This method calculates fringe phases using the generalized phase-shifting algorithm and estimates coefficients related to illumination fluctuation by use of smoothed phase map. Alternately implementing these two steps enables one to eliminate effects of illumination fluctuations on the measurement results. Experimental results demonstrate that this proposed algorithm is helpful for improving measurement accuracy. (c) 2023 Optica Publishing Group
引用
收藏
页码:8451 / 8461
页数:11
相关论文
共 50 条
  • [21] Shadow moire profilometry using the phase-shifting method
    Jin, LH
    Kodera, Y
    Yoshizawa, T
    Otani, Y
    OPTICAL ENGINEERING, 2000, 39 (08) : 2119 - 2123
  • [22] A new method for compensating phase-shifting error in phase measuring profilometry
    Zhu, Lin
    Da, Feipeng
    Gai, Shaoyan
    Dongnan Daxue Xuebao (Ziran Kexue Ban)/Journal of Southeast University (Natural Science Edition), 2010, 40 (SUPPL. 1): : 302 - 307
  • [23] AN ATOMICITY-CONSTRAINED LEAST-SQUARES PHASE-REFINEMENT METHOD
    RIUS, J
    MIRAVITLLES, C
    ACTA CRYSTALLOGRAPHICA SECTION A, 1991, 47 : 567 - 571
  • [24] Improved least-squares method for phase-to-height relationship in fringe projection profilometry
    Chung, Byeong-Mook
    JOURNAL OF THE EUROPEAN OPTICAL SOCIETY-RAPID PUBLICATIONS, 2016, 12
  • [25] Accelerated phase-measuring algorithm of least squares for phase-shifting interferometry
    Kim, SW
    Kang, MG
    Han, GS
    OPTICAL ENGINEERING, 1997, 36 (11) : 3101 - 3106
  • [26] Phase retrieval from random phase-shifting interferograms using neural network and least squares method
    Yan, Ketao
    Huang, Xinhao
    Yu, Wenjun
    Cao, Yiqing
    Zhou, Wenjing
    Yu, Yingjie
    OPTICS AND LASERS IN ENGINEERING, 2025, 184
  • [27] Correcting Phase Unwrapping Errors with Color Phase Shifting Method
    Iwasa, Takashi
    Ohtani, Kozo
    Baba, Mitsuru
    2012 PROCEEDINGS OF SICE ANNUAL CONFERENCE (SICE), 2012, : 1248 - 1251
  • [28] An illumination-invariant phase-shifting algorithm for three-dimensional profilometry
    Deng, Fuqin
    Liu, Chang
    Sze, Wuifung
    Deng, Jiangwen
    Fung, Kenneth S. M.
    Leung, W. H.
    Lam, Edmund Y.
    IMAGE PROCESSING: MACHINE VISION APPLICATIONS V, 2012, 8300
  • [29] A novel phase-shifting profilometry to realize temporal phase unwrapping simultaneously with the least fringe patterns
    Wu, Haitao
    Cao, Yiping
    An, Haihua
    Li, Yang
    Li, Hongmei
    Xu, Cai
    Yang, Na
    Optics and Lasers in Engineering, 2022, 153
  • [30] A novel phase-shifting profilometry to realize temporal phase unwrapping simultaneously with the least fringe patterns
    Wu, Haitao
    Cao, Yiping
    An, Haihua
    Li, Yang
    Li, Hongmei
    Xu, Cai
    Yang, Na
    OPTICS AND LASERS IN ENGINEERING, 2022, 153