ZnO with p-Type Doping: Recent Approaches and Applications

被引:20
|
作者
Yang, Ruqi [1 ]
Wang, Fengzhi [1 ,2 ]
Lu, Jianguo [1 ,2 ]
Lu, Yangdan [1 ]
Lu, Bojing [1 ]
Li, Siqin [1 ]
Ye, Zhizhen [1 ,2 ]
机构
[1] University, Sch Mat Sci & Engn, State Key Lab Silicon & Adv Semicond Mat, Hangzhou 310027, Zhejiang, Peoples R China
[2] Zhejiang Univ, Inst Wenzhou, Wenzhou Key Lab Novel Optoelect & Nano Mat, Wenzhou 325006, Peoples R China
关键词
ZnO; p-type conduction; doping concentration; acceptor level; self-compensation; LIGHT-EMITTING-DIODES; THIN-FILMS; DUAL IMPLANTATION; FORMATION MECHANISM; OXYGEN VACANCIES; TEMPERATURE; HOMOJUNCTION; FABRICATION; NITROGEN; NANORODS;
D O I
10.1021/acsaelm.3c00515
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
ZnOis a significant semiconductor material with the characteristicsof direct band gap, large exciton binding energy, and easy growthof high-quality nanostructures, and it is widely used in various fields.However, obtaining high-quality p-type ZnO has become a significantobstacle to the wide application of ZnO. The research on p-ZnO startedseveral decades ago and is regarded as the research focus. Many researchershave obtained high-quality p-ZnO by chemical vapor deposition (CVD)and physical vapor deposition (PVD). To obtain high-quality p-ZnO,researchers have used some "better" techniques to improvethe crystal quality and mobility of p-ZnO, such as molecular beamepitaxy (MBE) and post-treatment. This review provides an overviewof some methods for obtaining high-quality p-ZnO, such as increasingthe acceptor concentration, shallowing acceptor energy levels, andreducing donor defects. In addition, we also review the applicationsof p-ZnO in LEDs, UV detectors, thin-film transistors, gas sensing,bionic materials, and other fields.
引用
收藏
页码:4014 / 4034
页数:21
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