ZnO with p-Type Doping: Recent Approaches and Applications

被引:20
|
作者
Yang, Ruqi [1 ]
Wang, Fengzhi [1 ,2 ]
Lu, Jianguo [1 ,2 ]
Lu, Yangdan [1 ]
Lu, Bojing [1 ]
Li, Siqin [1 ]
Ye, Zhizhen [1 ,2 ]
机构
[1] University, Sch Mat Sci & Engn, State Key Lab Silicon & Adv Semicond Mat, Hangzhou 310027, Zhejiang, Peoples R China
[2] Zhejiang Univ, Inst Wenzhou, Wenzhou Key Lab Novel Optoelect & Nano Mat, Wenzhou 325006, Peoples R China
关键词
ZnO; p-type conduction; doping concentration; acceptor level; self-compensation; LIGHT-EMITTING-DIODES; THIN-FILMS; DUAL IMPLANTATION; FORMATION MECHANISM; OXYGEN VACANCIES; TEMPERATURE; HOMOJUNCTION; FABRICATION; NITROGEN; NANORODS;
D O I
10.1021/acsaelm.3c00515
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
ZnOis a significant semiconductor material with the characteristicsof direct band gap, large exciton binding energy, and easy growthof high-quality nanostructures, and it is widely used in various fields.However, obtaining high-quality p-type ZnO has become a significantobstacle to the wide application of ZnO. The research on p-ZnO startedseveral decades ago and is regarded as the research focus. Many researchershave obtained high-quality p-ZnO by chemical vapor deposition (CVD)and physical vapor deposition (PVD). To obtain high-quality p-ZnO,researchers have used some "better" techniques to improvethe crystal quality and mobility of p-ZnO, such as molecular beamepitaxy (MBE) and post-treatment. This review provides an overviewof some methods for obtaining high-quality p-ZnO, such as increasingthe acceptor concentration, shallowing acceptor energy levels, andreducing donor defects. In addition, we also review the applicationsof p-ZnO in LEDs, UV detectors, thin-film transistors, gas sensing,bionic materials, and other fields.
引用
收藏
页码:4014 / 4034
页数:21
相关论文
共 50 条
  • [21] P-type ZnO thin films via phosphorus doping
    Norton, D. P.
    Kim, H. S.
    Erie, J. M.
    Pearton, S. J.
    Wang, Y. L.
    Ren, F.
    ZINC OXIDE MATERIALS AND DEVICES III, 2008, 6895
  • [22] Critical conditions for the formation of p-type ZnO with Li doping
    Jin, Mingge
    Li, Zhibing
    Huang, Feng
    Xia, Yu
    Ji, Xu
    Wang, Weiliang
    RSC ADVANCES, 2018, 8 (54): : 30868 - 30874
  • [23] p-type ZnO layer formation by excimer laser doping
    Aoki, T
    Shimizu, Y
    Miyake, A
    Nakamura, A
    Nakanishi, Y
    Hatanaka, Y
    PHYSICA STATUS SOLIDI B-BASIC SOLID STATE PHYSICS, 2002, 229 (02): : 911 - 914
  • [24] Tuning doping site and type by strain: Enhanced p-type doping in Li doped ZnO
    Zhu, Junyi
    Wei, Su-Huai
    SOLID STATE COMMUNICATIONS, 2011, 151 (20) : 1437 - 1439
  • [25] p-Type ZnO
    不详
    AMERICAN CERAMIC SOCIETY BULLETIN, 2005, 84 (03): : 4 - 4
  • [26] Sb-doping of ZnO: Phase segregation and its impact on p-type doping
    Friedrich, F.
    Sieber, I.
    Klimm, C.
    Klaus, M.
    Genzel, Ch.
    Nickel, N. H.
    APPLIED PHYSICS LETTERS, 2011, 98 (13)
  • [27] The recent advances of research on p-type ZnO thin film
    L. P. Dai
    H. Deng
    F. Y. Mao
    J. D. Zang
    Journal of Materials Science: Materials in Electronics, 2008, 19 : 727 - 734
  • [28] The recent advances of research on p-type ZnO thin film
    Dai, L. P.
    Deng, H.
    Mao, F. Y.
    Zang, J. D.
    JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS, 2008, 19 (8-9) : 727 - 734
  • [29] P-type ZnO by Sb doping for PN-junction photodetectors
    Liu, J. L.
    Xiu, F. X.
    Mandalapu, L. J.
    Yang, Z.
    ZINC OXIDE MATERIALS AND DEVICES, 2006, 6122
  • [30] Preparation of p-type ZnO films by doping of Be-N bonds
    Sanmyo, M
    Tomita, Y
    Kobayashi, K
    CHEMISTRY OF MATERIALS, 2003, 15 (04) : 819 - 821