Solubility of Magnesium in Silicon

被引：0
|
作者：
Shuman, V. B. [1 ]
Lavrentiev, A. A. [1 ]
Yakovleva, A. A. [1 ]
Abrosimov, N. V. [2 ]
Lodygin, A. N. [1 ]
Portsel, L. M. [1 ]
Astrov, Yu. A. [1 ]
机构：
[1] Ioffe Inst, St Petersburg 194021, Russia
[2] Leibniz Inst Kristallzuchtung IKZ, D-12489 Berlin, Germany
来源：
SEMICONDUCTORS | 2023年 / 57卷 / 10期
关键词：
silicon; doping; magnesium impurity; solubility; DIFFUSION; IMPURITY; CALCIUM;
D O I：
10.1134/S1063782623070175
中图分类号：
O469 [凝聚态物理学];
学科分类号：
070205 ;
摘要：
The solubility of impurity magnesium, which was introduced by diffusion in the temperature range of 1100-1300 degrees C in silicon, is studied by secondary-ion mass spectrometry. It is demonstrated that, with the electrically inactive impurity component taken into account, the maximum solubility of magnesium in silicon is 1-2 orders of magnitude lower (and the diffusion coefficient is higher) than the values reported earlier.
引用
收藏
页码：465 / 468
页数：4
相关论文
共 50 条
  • [41] INVESTIGATION OF SOLID SOLUBILITY OF SAMARIUM IN MAGNESIUM
    ROKHLIN, LL
    PADEZHNOVA, EM
    GUZEY, LS
    RUSSIAN METALLURGY, 1976, (06): : 164 - 166
  • [42] SOLUBILITY OF MAGNESIUM AMMONIUM PHOSPHATE HEXAHYDRATE
    UNCLES, RF
    SMITH, GBL
    INDUSTRIAL AND ENGINEERING CHEMISTRY-ANALYTICAL EDITION, 1946, 18 (11): : 699 - 702
  • [43] SOLUBILITY PRODUCT OF MAGNESIUM AND CALCIUM SELENITES
    SAVENKO, VS
    ZHURNAL NEORGANICHESKOI KHIMII, 1995, 40 (08): : 1254 - 1256
  • [44] Solubility of chloride in molten magnesium metal
    Rosenkilde C.
    Arnesen L.H.
    Wallevik O.
    Journal of Phase Equilibria and Diffusion, 2004, 25 (3) : 255 - 258
  • [45] MEASUREMENT OF SOLUBILITY OF HYDROGEN IN SOLID MAGNESIUM
    POPOVIC, ZD
    PIERCY, GR
    METALLURGICAL TRANSACTIONS A-PHYSICAL METALLURGY AND MATERIALS SCIENCE, 1975, 6 (10): : 1915 - 1917
  • [46] The solubility of gypsum in magnesium sulphate solutions
    Cameron, FK
    Bell, JM
    JOURNAL OF PHYSICAL CHEMISTRY, 1906, 10 (03): : 210 - 215
  • [47] CONSTITUTION AND SOLUBILITY OF CALCIUM MAGNESIUM PHOSPHATE
    ANDO, J
    MATSUNO, S
    AKIYAMA, T
    KOGYO KAGAKU ZASSHI, 1961, 64 (12): : 2110 - &
  • [48] The solubility of magnesium carbonate in natural waters
    Wells, RC
    JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 1915, 37 : 1704 - 1707
  • [49] SOLUBILITY OF MAGNESIUM OXIDE IN MOLTEN SALTS
    MARTIN, RL
    WEST, JB
    JOURNAL OF INORGANIC & NUCLEAR CHEMISTRY, 1962, 24 (JAN): : 105 - 111
  • [50] Solid solubility of magnesium oxide in aluminoferrite
    Li, Jing
    Cao, Deguang
    Nong, Shilei
    Nong, Rong
    Liu, Wenwei
    Chen, Chunyan
    ADVANCES IN CEMENT RESEARCH, 2016, 28 (05) : 336 - 343
12345