An Ultra-Flexible Tactile Sensor Using Silk Piezoelectric Thin Film

被引:6
|
作者
Bonam, Satish [1 ]
Bhagavathi, K. Aditya [1 ]
Joseph, Jose [2 ]
Singh, Shiv Govind [1 ]
Vanjari, Siva Rama Krishna [1 ]
机构
[1] Indian Inst Technol Hyderabad, Elect Engn Dept, Hyderabad 502284, India
[2] Digital Univ Kerala, Sch Elect Syst & Automat, Trivandrum 695317, India
关键词
Piezoelectric; tactile sensor; thin film; silk;
D O I
10.1109/JSEN.2023.3294644
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Tactile sensors are pressure/strain sensors that facilitate the measurement of mechanical stimuli arising from living and nonliving objects to fetch information about their physical state. These systems are of utmost importance in applications such as artificial intelligence, robotic-based prosthetics, and healthcare. To mimic the human nature of touch perception, the flexibility of active sensing material is a critical requirement in the construction of a tactile sensor. Finding a biocompatible, flexible material with moderately high sensitivity is the major hurdle in the development of prosthetic wearable and implantable devices. In this article, we report, for the first time, a silk-based ultra-flexible tactile sensor that draws on the piezoelectric property of silk thin film. The fabrication of the tactile sensor involves only one lithography step and one spin coating step, which makes it easy to be realized in resource-constrained laboratory settings. A systematic analysis is carried out to correlate the performance of the sensor with the properties of silk thin films prepared under different conditions. To assess the potential of the silk-based tactile sensor's utility in practical applications, the linearity, repeatability, and stability of the fabricated devices are also analyzed. Apart from that, the tactile sensor is attached to different body parts to detect and distinguish various body movements. It is observed that the silk-based tactile sensor could detect different body movements distinctly, stably, and accurately.
引用
收藏
页码:18656 / 18663
页数:8
相关论文
共 50 条
  • [41] Piezoelectric ultra-sensitive aluminum nitride thin film on flexible aluminum substrate
    Bishara, H.
    Berger, S.
    JOURNAL OF MATERIALS SCIENCE, 2018, 53 (02) : 1246 - 1255
  • [42] Efforts of implementing ultra-flexible thin-film encapsulation for optoelectronic devices based on atomic layer deposition technology
    Wang, Guanran
    Duan, Yu
    SMARTMAT, 2024, 5 (06):
  • [43] An ultra-flexible plasmonic metamaterial film for efficient omnidirectional and broadband optical absorption
    Zhang, Hui
    Feng, Lei
    Liang, Yuzhang
    Xu, Ting
    NANOSCALE, 2019, 11 (02) : 437 - 443
  • [44] A novel ultra-thin and high toughness piezoelectric thin film sensor based on MEMS technology
    Shang Y.
    Zhang H.
    Liu W.
    Zhao X.
    Chen D.
    Wu Z.
    Ai C.
    International Journal of Nanomanufacturing, 2023, 18 (3-4) : 171 - 177
  • [45] A flexible tactile sensor based on piezoresistive thin film for 3D force detection
    Liu, Yan
    Han, Haijun
    Mo, Yuming
    Wang, Xiaolong
    Li, Huafeng
    Zhang, Jin
    REVIEW OF SCIENTIFIC INSTRUMENTS, 2022, 93 (08):
  • [46] Degradable, ultra-flexible, transparent and conductive film made of assembling CuNWs on chitosan
    Yu, Shihui
    Liu, Zengwen
    Zhao, Le
    Li, Lingxia
    OPTICAL MATERIALS, 2022, 123
  • [47] Robot tactile recognition system based on piezoelectric film sensor
    Wang Y.-H.
    Sun M.-H.
    Xin Y.
    Zhang B.-X.
    Zhejiang Daxue Xuebao (Gongxue Ban)/Journal of Zhejiang University (Engineering Science), 2022, 56 (04): : 702 - 710
  • [48] Ultra-Flexible, "Invisible" Thin-Film Transistors Enabled by Amorphous Metal Oxide/Polymer Channel Layer Blends
    Yu, Xinge
    Zeng, Li
    Zhou, Nanjia
    Guo, Peijun
    Shi, Fengyuan
    Buchholz, Donald B.
    Ma, Q.
    Yu, Junsheng
    Dravid, Vinayak P.
    Chang, Robert P. H.
    Bedzyk, Michael
    Marks, Tobin J.
    Facchetti, Antonio
    ADVANCED MATERIALS, 2015, 27 (14) : 2390 - 2399
  • [49] Ultra-Sensitive Strain Sensor Based on Flexible Poly(vinylidene fluoride) Piezoelectric Film
    Kai Lu
    Wen Huang
    Junxiong Guo
    Tianxun Gong
    Xiongbang Wei
    Bing-Wei Lu
    Si-Yi Liu
    Bin Yu
    Nanoscale Research Letters, 2018, 13
  • [50] Ultra-Sensitive Strain Sensor Based on Flexible Poly(vinylidene fluoride) Piezoelectric Film
    Lu, Kai
    Huang, Wen
    Guo, Junxiong
    Gong, Tianxun
    Wei, Xiongbang
    Lu, Bing-Wei
    Liu, Si-Yi
    Yu, Bin
    NANOSCALE RESEARCH LETTERS, 2018, 13