An Ultra-Flexible Tactile Sensor Using Silk Piezoelectric Thin Film

被引:6
|
作者
Bonam, Satish [1 ]
Bhagavathi, K. Aditya [1 ]
Joseph, Jose [2 ]
Singh, Shiv Govind [1 ]
Vanjari, Siva Rama Krishna [1 ]
机构
[1] Indian Inst Technol Hyderabad, Elect Engn Dept, Hyderabad 502284, India
[2] Digital Univ Kerala, Sch Elect Syst & Automat, Trivandrum 695317, India
关键词
Piezoelectric; tactile sensor; thin film; silk;
D O I
10.1109/JSEN.2023.3294644
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Tactile sensors are pressure/strain sensors that facilitate the measurement of mechanical stimuli arising from living and nonliving objects to fetch information about their physical state. These systems are of utmost importance in applications such as artificial intelligence, robotic-based prosthetics, and healthcare. To mimic the human nature of touch perception, the flexibility of active sensing material is a critical requirement in the construction of a tactile sensor. Finding a biocompatible, flexible material with moderately high sensitivity is the major hurdle in the development of prosthetic wearable and implantable devices. In this article, we report, for the first time, a silk-based ultra-flexible tactile sensor that draws on the piezoelectric property of silk thin film. The fabrication of the tactile sensor involves only one lithography step and one spin coating step, which makes it easy to be realized in resource-constrained laboratory settings. A systematic analysis is carried out to correlate the performance of the sensor with the properties of silk thin films prepared under different conditions. To assess the potential of the silk-based tactile sensor's utility in practical applications, the linearity, repeatability, and stability of the fabricated devices are also analyzed. Apart from that, the tactile sensor is attached to different body parts to detect and distinguish various body movements. It is observed that the silk-based tactile sensor could detect different body movements distinctly, stably, and accurately.
引用
收藏
页码:18656 / 18663
页数:8
相关论文
共 50 条
  • [21] All-solution-processed PIN architecture for ultra-sensitive and ultra-flexible organic thin film photodetectors
    Zhiwen Jin
    Qing Zhou
    Peng Mao
    Hui Li
    Jizheng Wang
    Science China(Chemistry), 2016, (10) : 1258 - 1263
  • [22] All-solution-processed PIN architecture for ultra-sensitive and ultra-flexible organic thin film photodetectors
    Zhiwen Jin
    Qing Zhou
    Peng Mao
    Hui Li
    Jizheng Wang
    Science China(Chemistry), 2016, 59 (10) : 1258 - 1263
  • [23] All-solution-processed PIN architecture for ultra-sensitive and ultra-flexible organic thin film photodetectors
    Jin, Zhiwen
    Zhou, Qing
    Mao, Peng
    Li, Hui
    Wang, Jizheng
    SCIENCE CHINA-CHEMISTRY, 2016, 59 (10) : 1258 - 1263
  • [24] All-solution-processed PIN architecture for ultra-sensitive and ultra-flexible organic thin film photodetectors
    Zhiwen Jin
    Qing Zhou
    Peng Mao
    Hui Li
    Jizheng Wang
    Science China Chemistry, 2016, 59 : 1258 - 1263
  • [25] A preliminary study on detection of muscle activity using a flexible AlN piezoelectric thin film sensor
    Bu, Nan
    Fukuda, Osamu
    Ueno, Naohiro
    Inoue, Masahiro
    2009 IEEE INTERNATIONAL CONFERENCE ON ROBOTICS AND BIOMIMETICS (ROBIO 2009), VOLS 1-4, 2009, : 944 - +
  • [26] Highly pixelated, untethered tactile interfaces for an ultra-flexible on-skin telehaptic system
    Hanbit Jin
    Yunjeong Kim
    Wooseup Youm
    Yulim Min
    Saerom Seo
    Chaehyun Lim
    Chan-Hwa Hong
    Seyoung Kwon
    Gyeongseok Park
    Steve Park
    Hye Jin Kim
    npj Flexible Electronics, 6
  • [27] THIN-FILM SILICON RESONATORS ON ULTRA-FLEXIBLE 10 MICROMETER-THICK POLYIMIDE SUBSTRATES
    Pestana, Tiago G.
    Pinto, Rui M. R.
    Dias, Rosana A.
    Martins, Marco
    Chu, Virginia
    Gaspar, Joao
    Conde, Joao P.
    2019 20TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS & EUROSENSORS XXXIII (TRANSDUCERS & EUROSENSORS XXXIII), 2019, : 2539 - 2542
  • [28] Flexible Piezoelectric Polymer Membrane as Effective Tactile Sensor
    Yadav, Mantesh Kumari
    Padalia, Diwakar
    Yadav, Nitish
    IEEE Journal on Flexible Electronics, 2024, 3 (08): : 383 - 391
  • [29] Ultra-thin Film Piezoelectric AlN Cantilevers for Flexible MEMS Sensors
    Rayhan, Md Sajeeb
    Butler, Donald P.
    Celik-Butler, Zeynep
    2015 IEEE SENSORS, 2015, : 259 - 262
  • [30] Ultra Thin Optical Tactile Shear Sensor
    Missinne, Jeroen
    Bosman, Erwin
    Van Hoe, Bram
    Verplancke, Rik
    Van Steenberge, Geert
    Kalathimekkad, Sandeep
    Van Daele, Peter
    Vanfleteren, Jan
    EUROSENSORS XXV, 2011, 25