Intercalated Multilayer Graphene / Nickel Hybrid Antenna with Enhanced Inductance Density for Size Reduction

被引：0

作者：

Hosokawa, Keigo ^{[1
]}

Matsunaga, Kenta ^{[1
]}

Ueno, Kazuyoshi ^{[1
]}

机构：

[1] Shibaura Inst Technol SIT, Grad Sch Engn & Sci, Saitama, Japan

来源：

2023 7TH IEEE ELECTRON DEVICES TECHNOLOGY & MANUFACTURING CONFERENCE, EDTM | 2023年

关键词：

RF device scaling; graphene antenna;

D O I：

10.1109/EDTM55494.2023.10103110

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A hybrid structure of intercalated multilayer graphene (I-MLG) on nickel (Ni) is proposed as a new conductor structure with enhanced inductance density for RF device scaling. The size reduction is demonstrated with fabricating a I-MLG / Ni antenna using a high crystallinity MLG-CVD on Ni and a stable intercalation with molybdenum chloride (MoCl5). According to the resonant frequency shift, the 33 % area reduction is expected by the new structure. The new structure is promising for RF device scaling in 5G communication and beyond.

引用

页数：3

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