Intercalated Multilayer Graphene / Nickel Hybrid Antenna with Enhanced Inductance Density for Size Reduction

被引：0
|
作者：
Hosokawa, Keigo [1 ]
Matsunaga, Kenta [1 ]
Ueno, Kazuyoshi [1 ]
机构：
[1] Shibaura Inst Technol SIT, Grad Sch Engn & Sci, Saitama, Japan
来源：
2023 7TH IEEE ELECTRON DEVICES TECHNOLOGY & MANUFACTURING CONFERENCE, EDTM | 2023年
关键词：
RF device scaling; graphene antenna;
D O I：
10.1109/EDTM55494.2023.10103110
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A hybrid structure of intercalated multilayer graphene (I-MLG) on nickel (Ni) is proposed as a new conductor structure with enhanced inductance density for RF device scaling. The size reduction is demonstrated with fabricating a I-MLG / Ni antenna using a high crystallinity MLG-CVD on Ni and a stable intercalation with molybdenum chloride (MoCl5). According to the resonant frequency shift, the 33 % area reduction is expected by the new structure. The new structure is promising for RF device scaling in 5G communication and beyond.
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页数：3
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