共 50 条
- [3] The structure of Cu-Al films prepared by unbalanced DC magnetron sputtering SURFACE & COATINGS TECHNOLOGY, 1997, 96 (2-3): : 359 - 363
- [7] Process investigation of a-Si:H thin films prepared by DC magnetron sputtering LASERS IN MATERIAL PROCESSING AND MANUFACTURING III, 2008, 6825
- [8] Microstructure and mechanical performance of (AlCrNbSiTiV)N films coated by reactive magnetron sputtering Bulletin of Materials Science, 2019, 42