Development of MEMS-based micro capacitive tactile probe

被引：0

作者：

雷李华 ^{[1
,2
]}

李源 ^{[2
]}

范国芳 ^{[3
]}

吴俊杰 ^{[2
]}

简黎 ^{[2
]}

蔡潇雨 ^{[2
]}

李同保 ^{[1
]}

机构：

[1] School of Physics Science and Engineering, Tongji University

[2] Shanghai Institute of Measurement and Testing Technology, National Center of Measurement and Testing for East China, National Center of Testing Technology

[3] Key Laboratory of Photochemical Conversion and Optoelectronic Materials,Technical Institute of Physics and Chemistry, Chinese Academy of Sciences

来源：

Chinese Physics B | 2014年 / 11期

基金：

中国国家自然科学基金;

关键词：

micro tactile probe; micro capacitive sensor; MEMS; nano measuring machine;

D O I：

暂无

中图分类号：

TM53 [电容器];

学科分类号：

摘要：

In this paper, a micro capacitive sensor with nanometer resolution is presented for ultra-precision measurement of micro components, which is fabricated by the MEMS(micro electromechanical systems) non-silicon technique. Based on the sensor, a micro capacitive tactile probe is constructed by stylus assembly and packaging design for dimension metrology on micro/nano scale, in which a data acquiring system is developed with AD7747. Some measurements of the micro capacitive tactile probe are performed on a nano positioning and measuring machine(NMM). The measurement results show good linearity and hysteresis with a range of 11.6 μm and resolution of better than 5 nm. Hence, the micro capacitive tactile probe can be integrated on NMM to realize measurement of micro structures with nanometer accuracy.

引用

页码：650 / 654

页数：5

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