Development of MEMS-based micro capacitive tactile probe

被引：0
|
作者：
雷李华 [1 ,2 ]
李源 [2 ]
范国芳 [3 ]
吴俊杰 [2 ]
简黎 [2 ]
蔡潇雨 [2 ]
李同保 [1 ]
机构：
[1] School of Physics Science and Engineering, Tongji University
[2] Shanghai Institute of Measurement and Testing Technology, National Center of Measurement and Testing for East China, National Center of Testing Technology
[3] Key Laboratory of Photochemical Conversion and Optoelectronic Materials,Technical Institute of Physics and Chemistry, Chinese Academy of Sciences
来源：
Chinese Physics B | 2014年 / 11期
基金：
中国国家自然科学基金;
关键词：
micro tactile probe; micro capacitive sensor; MEMS; nano measuring machine;
D O I：
暂无
中图分类号：
TM53 [电容器];
学科分类号：
摘要：
In this paper, a micro capacitive sensor with nanometer resolution is presented for ultra-precision measurement of micro components, which is fabricated by the MEMS(micro electromechanical systems) non-silicon technique. Based on the sensor, a micro capacitive tactile probe is constructed by stylus assembly and packaging design for dimension metrology on micro/nano scale, in which a data acquiring system is developed with AD7747. Some measurements of the micro capacitive tactile probe are performed on a nano positioning and measuring machine(NMM). The measurement results show good linearity and hysteresis with a range of 11.6 μm and resolution of better than 5 nm. Hence, the micro capacitive tactile probe can be integrated on NMM to realize measurement of micro structures with nanometer accuracy.
引用
收藏
页码：650 / 654
页数：5
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