Silica as a two-dimensional material for nano-electronics

被引:0
|
作者
Ferry, David K. [1 ]
机构
[1] Arizona State Univ, Sch Elect Comp & Energy Engn, Tempe, AZ 85287 USA
关键词
ultra-thin layer; electron mobility; conductivity; field-effect transistor; nanosheet transistor; POLAR PHONON-SCATTERING; ROOM-TEMPERATURE; DIFFUSION; CHARGE; TRANSPORT; BREAKDOWN; MOBILITY; DIOXIDE; SIO2; NANOTECHNOLOGY;
D O I
10.1088/1361-6641/adaa97
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Modern microelectronics has transitioned from planar metal-oxide-semiconductor transistors to finFETs to nanowire FETs, and most recently to nanosheet (NS) FETs, in which the channel is composed of a group of gate-all-around thin layers of silicon or a substitute material. It has been suggested that some two-dimensional materials may be used to replace the silicon in these NS FETs. While such two-dimensional materials have been studied over the past couple of decades, they have questionable properties for this application. In fact, it is pointed out here that silica itself may be a more suitable material for use in NS transistors. The properties of silica are discussed, and comparisons with other materials are given. It is shown that silica has a number of advantageous properties for use as a NS, provided that more research can establish viable methods of controlling required dopants for active layers.
引用
收藏
页数:12
相关论文
共 50 条
  • [41] Electronics based on two-dimensional materials
    Fiori, Gianluca
    Bonaccorso, Francesco
    Iannaccone, Giuseppe
    Palacios, Tomas
    Neumaier, Daniel
    Seabaugh, Alan
    Banerjee, Sanjay K.
    Colombo, Luigi
    NATURE NANOTECHNOLOGY, 2014, 9 (10) : 768 - 779
  • [42] Two-dimensional electronics supply chain
    Navas, Deb
    ID Systems, 2000, 20 (03):
  • [43] Hybrid dielectrics for two-dimensional electronics
    Liu, Yang
    Hone, James C.
    NATURE MATERIALS, 2023, 22 (09) : 1059 - 1060
  • [44] Two-Dimensional Materials for Ubiquitous Electronics
    Wang, Han
    Yu, Lili
    Zhang, Xu
    Mailly, Benjamin
    Mackin, Charles
    Kong, Jing
    Palacios, Tomas
    2013 IEEE MTT-S INTERNATIONAL MICROWAVE SYMPOSIUM DIGEST (IMS), 2013,
  • [45] Silicon-carbide nano-clusters: A pathway to future nano-electronics
    Ray, Asok K.
    Huda, M. N.
    JOURNAL OF COMPUTATIONAL AND THEORETICAL NANOSCIENCE, 2006, 3 (03) : 315 - 341
  • [46] Two-dimensional crystals of silica
    Shishacow, NA
    ACTA PHYSICOCHIMICA URSS, 1937, 7 (05): : 727 - 736
  • [47] In sight into nano-electronics: Devices, functional principles and a virtual trip
    Gleiche, Michael
    Haumann, Carola
    Baron, Waldemar
    Dressen, Jochen
    VAKUUM IN FORSCHUNG UND PRAXIS, 2006, 18 (05) : 26 - 31
  • [48] International Conference on Micro- and Nano-Electronics 2014 Introduction
    Orlikovsky, Alexander A.
    INTERNATIONAL CONFERENCE ON MICRO- AND NANO-ELECTRONICS 2014, 2014, 9440 : XV - XV
  • [49] Silicon-carbide nano-clusters: A pathway to future nano-electronics
    Department of Physics, University of Texas at Arlington, Arlington, TX 76019, United States
    不详
    J. Comput. Theor. Nanosci., 2006, 3 (315-341):
  • [50] Electromagnetic Compatibility in Nano-Electronics: Manifestation and Suppression of Quantum Crosstalk
    Slepyan, G.
    Boag, A.
    Mordachev, V.
    Sinkevich, E.
    Maksimenko, S.
    Kuzhir, P.
    Miano, G.
    Portnoi, M. E.
    Maffucci, A.
    2015 IEEE INTERNATIONAL CONFERENCE ON MICROWAVES, COMMUNICATIONS, ANTENNAS AND ELECTRONIC SYSTEMS (COMCAS), 2015,