Synthesis of SiAlCO Coatings by Thermal Anodic Evaporation of Al and Decomposition of Tetraethoxysilane in an Arc Discharge with a Sectional Anode

被引：0
|
作者：
Y. A. Bruhanova [1 ]
A. I. Menshakov [2 ]
P. A. Skorynina [1 ]
机构：
[1] Institute of Electrophysics of the Ural Branch of the Russian Academy of Sciences,
[2] Ural Federal University,undefined
[3] Institute of Engineering Science of the Ural Branch of the Russian Academy of Sciences,undefined
来源：
Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques | 2024年 / 18卷 / Suppl 1期
关键词：
SiAlCO coatings; sectional anode; reactive thermal anodic evaporation;
D O I：
10.1134/S1027451024701921
中图分类号：
学科分类号：
摘要：
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页码：S100 / S105
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