Synthesis of SiAlCO Coatings by Thermal Anodic Evaporation of Al and Decomposition of Tetraethoxysilane in an Arc Discharge with a Sectional Anode

被引：0

作者：

Y. A. Bruhanova ^{[1
]}

A. I. Menshakov ^{[2
]}

P. A. Skorynina ^{[1
]}

机构：

[1] Institute of Electrophysics of the Ural Branch of the Russian Academy of Sciences,

[2] Ural Federal University,undefined

[3] Institute of Engineering Science of the Ural Branch of the Russian Academy of Sciences,undefined

来源：

关键词：

SiAlCO coatings; sectional anode; reactive thermal anodic evaporation;

D O I：

10.1134/S1027451024701921

中图分类号：

学科分类号：

摘要：

引用

页码：S100 / S105