Cleavage of Submicron Solid Films As a Method to Prepare Cross Sections from Heterostructures for High-Resolution Transmission Microscopy

被引：0
|
作者：
Vorob'ev, A. B. [1 ]
Gutakovsky, A. K. [1 ]
Prinz, V. Ya. [1 ]
机构：
[1] Russian Acad Sci, Rzhanov Inst Semicond Phys, Siberian Branch, Novosibirsk 630090, Russia
来源：
OPTOELECTRONICS INSTRUMENTATION AND DATA PROCESSING | 2024年 / 60卷 / 04期
关键词：
transmission electron microscopy; atomic resolution; free-standing thin film; cross section; brittle crack; cleavage; EPITAXIAL GAAS/ALAS SUPERLATTICES; INTERFACE STRUCTURE; QUANTUM-WIRE; RECONSTRUCTION; SEMICONDUCTORS; GAAS(311); QUALITY;
D O I：
10.3103/S8756699024700511
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
A method of preparation, which makes it possible to form defectless cross sections for transmission electron microscopy from heterostructures and ensures atomic resolution over a larger surface area, is described in details. The method is illustrated with examples of studies on complexly shaped heterointerfaces and selective oxidation and selective etching of superlattices.
引用
收藏
页码：447 / 456
页数：10
相关论文
共 50 条
  • [31] COMPOSITIONAL AND STRUCTURAL CHARACTERIZATION OF SIXGE1-X ALLOYS AND HETEROSTRUCTURES BY HIGH-RESOLUTION TRANSMISSION ELECTRON-MICROSCOPY
    STENKAMP, D
    JAGER, W
    ULTRAMICROSCOPY, 1993, 50 (03) : 321 - 354
  • [32] Study of synthetic hydroxyapatite by the method of high-resolution transmission electron microscopy: Morphology and growth direction
    Suvorova, EI
    Polyak, LE
    Komarov, VF
    Melikhov, IV
    CRYSTALLOGRAPHY REPORTS, 2000, 45 (05) : 857 - 861
  • [33] Direct observation of order in the liquid at a solid-liquid interface by high-resolution transmission electron microscopy
    Howe, JM
    PHILOSOPHICAL MAGAZINE A-PHYSICS OF CONDENSED MATTER STRUCTURE DEFECTS AND MECHANICAL PROPERTIES, 1996, 74 (03): : 761 - 775
  • [34] Direct observation of order in the liquid at a solid-liquid interface by high-resolution transmission electron microscopy
    Dept. of Mat. Sci. and Engineering, University of Virginia, Charlottesville, VA 22903-2442, United States
    Philos. Mag. A Phys. Condens. Matter Struct. Defects Mech. Prop., 3 (761-775):
  • [35] HIGH-RESOLUTION SCANNING-TRANSMISSION ELECTRON-MICROSCOPY - ASPECTS AND TRENDS OF A NEW METHOD
    WILLASCH, D
    JOURNAL DE MICROSCOPIE ET DE SPECTROSCOPIE ELECTRONIQUES, 1976, 1 (03): : 505 - 506
  • [36] Study of synthetic hydroxyapatite by the method of high-resolution transmission electron microscopy: Morphology and growth direction
    E. I. Suvorova
    L. E. Polyak
    V. F. Komarov
    I. V. Melikhov
    Crystallography Reports, 2000, 45 : 857 - 861
  • [37] A quantitative method for measuring small residual beam tilts in high-resolution transmission electron microscopy
    Ming, Wenquan
    Chen, Jianghua
    Allen, Christopher S.
    Duan, Shiyun
    Shen, Ruohan
    ULTRAMICROSCOPY, 2018, 184 : 18 - 28
  • [38] High-resolution transmission electron microscopy study of carbon deposited on the NiO MgO solid solution catalysts
    Hu, YH
    Ruckenstein, E
    JOURNAL OF CATALYSIS, 1999, 184 (01) : 298 - 302
  • [39] High-Resolution Transmission Electron Microscopy of Heteroepitaxial Barium Strontium Titanate Films Grown on MgO Substrates
    Zhigalina, O. M.
    Kuskova, A. N.
    Chuvilin, A. L.
    Mukhortov, V. M.
    Golovko, Yu. I.
    Kaiser, U.
    Gaynutdinov, R. V.
    JOURNAL OF SURFACE INVESTIGATION, 2009, 3 (04): : 542 - 547
  • [40] High-resolution transmission electron microscopy of heteroepitaxial barium strontium titanate films grown on MgO substrates
    O. M. Zhigalina
    A. N. Kuskova
    A. L. Chuvilin
    V. M. Mukhortov
    Yu. I. Golovko
    U. Kaiser
    R. V. Gaynutdinov
    Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques, 2009, 3 : 542 - 547
12345