Cleavage of Submicron Solid Films As a Method to Prepare Cross Sections from Heterostructures for High-Resolution Transmission Microscopy

被引：0
|
作者：
Vorob'ev, A. B. [1 ]
Gutakovsky, A. K. [1 ]
Prinz, V. Ya. [1 ]
机构：
[1] Russian Acad Sci, Rzhanov Inst Semicond Phys, Siberian Branch, Novosibirsk 630090, Russia
来源：
OPTOELECTRONICS INSTRUMENTATION AND DATA PROCESSING | 2024年 / 60卷 / 04期
关键词：
transmission electron microscopy; atomic resolution; free-standing thin film; cross section; brittle crack; cleavage; EPITAXIAL GAAS/ALAS SUPERLATTICES; INTERFACE STRUCTURE; QUANTUM-WIRE; RECONSTRUCTION; SEMICONDUCTORS; GAAS(311); QUALITY;
D O I：
10.3103/S8756699024700511
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
A method of preparation, which makes it possible to form defectless cross sections for transmission electron microscopy from heterostructures and ensures atomic resolution over a larger surface area, is described in details. The method is illustrated with examples of studies on complexly shaped heterointerfaces and selective oxidation and selective etching of superlattices.
引用
收藏
页码：447 / 456
页数：10
相关论文
共 50 条
  • [21] A METHOD FOR PREPARING CROSS-SECTIONS OF FILMS ON WEAR SURFACES FOR TRANSMISSION ELECTRON-MICROSCOPY STUDY
    IVES, LK
    WEAR, 1983, 86 (01) : 151 - 156
  • [22] High-resolution transmission electron microscopy (HRTEM) observation of dislocation structures in AlN thin films
    Tokumoto, Yuki
    Shibata, Naoya
    Mizoguchi, Teruyasu
    Sugiyama, Masakazu
    Shimogaki, Yukihiro
    Yang, Jung-Seung
    Yamamoto, Takahisa
    Ikuhara, Yuichi
    JOURNAL OF MATERIALS RESEARCH, 2008, 23 (08) : 2188 - 2194
  • [23] High-resolution transmission electron microscopy (HRTEM) observation of dislocation structures in AlN thin films
    Yuki Tokumoto
    Naoya Shibata
    Teruyasu Mizoguchi
    Masakazu Sugiyama
    Yukihiro Shimogaki
    Jung-Seung Yang
    Takahisa Yamamoto
    Yuichi Ikuhara
    Journal of Materials Research, 2008, 23 : 2188 - 2194
  • [24] A HIGH-RESOLUTION TRANSMISSION ELECTRON-MICROSCOPY STUDY OF ZRO2-CAO FILMS
    SHIOJIRI, M
    HIROTA, Y
    ISSHIKI, T
    MAEDA, T
    SEKIMOTO, S
    THIN SOLID FILMS, 1988, 162 (1-2) : 235 - 246
  • [25] CROSS-SECTIONAL TRANSMISSION ELECTRON-MICROSCOPY FOR IMAGING IC STRUCTURES WITH HIGH-RESOLUTION
    HENGHUBER, G
    OPPOLZER, H
    SCHILD, S
    SIEMENS FORSCHUNGS-UND ENTWICKLUNGSBERICHTE-SIEMENS RESEARCH AND DEVELOPMENT REPORTS, 1980, 9 (06): : 363 - 366
  • [26] Cross-sectional high-resolution transmission electron microscopy study of the structures of carbon nanotubes
    Bursill, L. A.
    Peng, J.-L.
    Fan, X.-D.
    Philosophical Magazine A: Physics of Condensed Matter, Defects and Mechanical Properties, 71 (5-2):
  • [27] Cross-sectional high-resolution transmission electron microscopy of the microstructure of electrochromic nickel oxide
    Song, XY
    He, YX
    Lampert, CM
    Hu, XF
    Chen, XF
    SOLAR ENERGY MATERIALS AND SOLAR CELLS, 2000, 63 (03) : 227 - 235
  • [28] Cross-sectional high-resolution transmission electron microscopy at Mo/Si multilayer stacks
    Hoeche, Thomas
    INTERNATIONAL JOURNAL OF MATERIALS RESEARCH, 2006, 97 (07) : 1046 - 1050
  • [29] Neuroanatomy from Mesoscopic to Nanoscopic Scales: An Improved Method for the Observation of Semithin Sections by High-Resolution Scanning Electron Microscopy
    Rodriguez, Jose-Rodrigo
    Turegano-Lopez, Marta
    DeFelipe, Javier
    Merchan-Perez, Angel
    FRONTIERS IN NEUROANATOMY, 2018, 12
  • [30] High-resolution absorption cross sections of formaldehyde at wavelengths from 313 to 320 nm
    Pope, FD
    Smith, CA
    Ashfold, MNR
    Orr-Ewing, AJ
    PHYSICAL CHEMISTRY CHEMICAL PHYSICS, 2005, 7 (01) : 79 - 84
12345