Spectroscopic-ellipsometry and thermoreflectance spectra of sputter-deposited InSb films

被引：0
|
作者：
Miyazaki, Takayuki [1 ]
Adachi, Sadao [1 ]
机构：
[1] Gunma Univ, Gunma, Japan
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 1994年 / 33卷 / 10期
关键词：
Dielectric properties - Electron energy levels - Ellipsometry - Mathematical models - Optical properties - Photons - Sapphire - Semiconducting indium compounds - Spectroscopy - Sputter deposition;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
Spectroscopic-ellipsometry (SE) and thermoreflectance (TR) spectra of InSb films sputter-deposited on sapphire substrates are reported. Measurements are made on the same crystal in the 1.5-5.5-eV photon energy range at room temperature. These data are analyzed on the basis of a simplified model of the interband transitions. Results are in satisfactory agreement with the experimental data over the entire range of photon energies. The finding definitely links the temperature-induced change in the dielectric function (TR) to the first derivative of the dielectric function (SE).
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页码：5817 / 5822
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