Spectroscopic-ellipsometry and thermoreflectance spectra of sputter-deposited InSb films

被引：0

作者：

Miyazaki, Takayuki ^{[1
]}

Adachi, Sadao ^{[1
]}

机构：

[1] Gunma Univ, Gunma, Japan

来源：

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 1994年 / 33卷 / 10期

关键词：

Dielectric properties - Electron energy levels - Ellipsometry - Mathematical models - Optical properties - Photons - Sapphire - Semiconducting indium compounds - Spectroscopy - Sputter deposition;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

Spectroscopic-ellipsometry (SE) and thermoreflectance (TR) spectra of InSb films sputter-deposited on sapphire substrates are reported. Measurements are made on the same crystal in the 1.5-5.5-eV photon energy range at room temperature. These data are analyzed on the basis of a simplified model of the interband transitions. Results are in satisfactory agreement with the experimental data over the entire range of photon energies. The finding definitely links the temperature-induced change in the dielectric function (TR) to the first derivative of the dielectric function (SE).

引用

页码：5817 / 5822

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