Analysis of specialities of GexC1-x films prepared by RF magnetron reactive sputtering

被引：0
|
作者：
Song, Jianquan
Liu, Zhengtang
Yu, Zhongqi
Geng, Dongsheng
Zheng, Xiulin
机构：
来源：
Cailiao Gongcheng/Journal of Materials Engineering | 2000年 / 10期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：15 / 17
相关论文
共 50 条
  • [1] Structure of GexC1-x films prepared by magnetron reactive sputtering
    Liu, Zhengtang
    Geng, Dongsheng
    Song, Jianquan
    Zhu, Jingzhi
    Zheng, Xiulin
    Jinshu Rechuli Xuebao/Transactions of Metal Heat Treatment, 2000, 21 (02): : 95 - 99
  • [2] Effect of target-substrate distance on reactive sputtering of GexC1-x films
    Song, Jianquan
    Liu, Zhengtang
    Zhu, Jingzhi
    Zheng, Xiulin
    Xibei Gongye Daxue Xuebao/Journal of Northwestern Polytechnical University, 1998, 16 (04): : 637 - 640
  • [3] STRUCTURE AND PROPERTIES OF NONHYDROGEN GexC1-x FILMS PREPARED BY PLD
    Cheng, Yong
    Huang, Guojun
    Lu, Yimin
    Guo, Yanlong
    Mi, Chaowei
    Cao, Haiyuan
    SURFACE REVIEW AND LETTERS, 2018, 25 (07)
  • [4] STRESS IN NBCXN1-X FILMS PREPARED BY REACTIVE RF MAGNETRON SPUTTERING
    KIRYU, S
    SHOJI, A
    KOHJIRO, S
    KODAIRA, S
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1993, 32 (6B): : L834 - L836
  • [5] Structural characterization of Ge microcrystals in GexC1-x films
    Carles, Robert, 1600, (31):
  • [6] STRUCTURAL CHARACTERIZATION OF GE MICROCRYSTALS IN GEXC1-X FILMS
    CARLES, R
    MLAYAH, A
    AMJOUD, M
    REYNES, A
    MORANCHO, R
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1992, 31 (11): : 3511 - 3514
  • [7] Carbon nitride thin films prepared by reactive rf magnetron sputtering
    Logothetidis, S
    Lefakis, H
    Gioti, M
    CARBON, 1998, 36 (5-6) : 757 - 760
  • [8] Carbon nitride thin films prepared by reactive rf magnetron sputtering
    Logothetidis, S
    Lefakis, H
    Gioti, M
    FULLERENES AND CARBON BASED MATERIALS, 1998, 68 : 757 - 760
  • [9] Nanostructure of ZnO thin films prepared by reactive rf magnetron sputtering
    Takai, O
    Futsuhara, M
    Shimizu, G
    Lungu, CP
    Nozue, J
    THIN SOLID FILMS, 1998, 318 (1-2) : 117 - 119
  • [10] Design and preparation of GexC1-x inhomogeneous antireflective and protective films
    2001, Science Press (31):
12345