Effect of target-substrate distance on reactive sputtering of GexC1-x films

被引：0
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作者：
Song, Jianquan [1 ]
Liu, Zhengtang [1 ]
Zhu, Jingzhi [1 ]
Zheng, Xiulin [1 ]
机构：
[1] Northwestern Polytechnical Univ, Xi'an, China
来源：
Xibei Gongye Daxue Xuebao/Journal of Northwestern Polytechnical University | 1998年 / 16卷 / 04期
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摘要：
(Edited Abstract)
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页码：637 / 640
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