Analysis of specialities of GexC1-x films prepared by RF magnetron reactive sputtering

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作者：
Song, Jianquan
Liu, Zhengtang
Yu, Zhongqi
Geng, Dongsheng
Zheng, Xiulin
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Cailiao Gongcheng/Journal of Materials Engineering | 2000年 / 10期
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页码：15 / 17
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