Self-development properties of nitrocellulose for focused ion beam lithography

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作者
Kaneko, Hidehiko [1 ]
Yasuoka, Yoshizumi [1 ]
Gamo, Kenji [1 ]
Namba, Susumu [1 ]
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[1] Natl Defense Acad, Japan
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页码:1764 / 1767
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