Cross-sectional electron microscopy observation on the amorphized indentation region in [001] single-crystal silicon

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Stt. Key Lab. Fatigue Fracture Mat., Inst. Metal Res., Chinese Acad. S., Shenyang, China [1 ]
不详 [2 ]
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Acta Mater | / 8卷 / 2431-2436期
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The authors appreciate the financial support from the National Natural Science Foundation of China (Grant Number: 59671040);
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