Optical emission diagnostics of the linear magnetron sputtering discharge

被引：0
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作者：
Kullakowska-Pawlak, B. [1 ]
Zyrnicki, W. [1 ]
Miernik, K. [1 ]
Walkowicz, J. [1 ]
机构：
[1] Wroclaw Univ of Technology, Wroclaw, Poland
来源：
Surface and Coatings Technology | 1999年 / 116卷
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页码：1076 / 1082
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