Polytype and surface characterization of silicon carbide thin films

被引：0
|
作者：
Schroeter, B. [1 ]
Kreuzberg, M. [1 ]
Fissel, A. [1 ]
Pfennighaus, K. [1 ]
Richter, W. [1 ]
机构：
[1] Friedrich-Schiller-Universitaet Jena, Jena, Germany
来源：
Materials Science Forum | 1998年 / 264-268卷 / pt 1期
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摘要：
8
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页码：355 / 358
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