Ion-Beam-Etched Pyroelectric High-Detectivity Sensors Based on LiNbO3.

被引：0
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作者：
Norkus, V.
Krauss, M.
Hofmann, G.
机构：
来源：
Feingeratetechnik Berlin | 1983年 / 32卷 / 11期
关键词：
FERROELECTRIC MATERIALS - Etching - ION BEAMS - Applications;
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学科分类号：
摘要：
Self-supporting pyroelectric LiNbO//3 wafers with an extremely small thickness of the sensitive element (4 to 7 mu m) were produced by means of ion beam etching after practical optimization of the technological parameters with regard to a high etching rate, and thus infrared radiation detectors with a high specific detectivity were synthesized.
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页码：496 / 498
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