SELF-ALIGNED CoSi2 INTERCONNECTION AND CONTACT TECHNOLOGY FOR VLSI APPLICATIONS.

被引：0
|
作者：
Van den hove, Luc [1 ]
Wolters, Rob [1 ]
Maex, Karen [1 ]
De Keersmaecker, Roger F. [1 ]
Declerck, Gilbert J. [1 ]
机构：
[1] Katholieke Univ Leuven, Belg, Katholieke Univ Leuven, Belg
来源：
IEEE Transactions on Electron Devices | 1987年 / ED-34卷 / 03期
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摘要：
16
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页码：554 / 561
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