Fabrication of an array of microcavities utilizing SU-8 photoresist as an alternative `LIGA' technology

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作者：
Roberts, Kevin [1 ]
Williamson, Fred [1 ]
Cibuzar, Greg [1 ]
Thomas, Lowell [1 ]
机构：
[1] Univ of Minnesota, Minneapolis, United States
来源：
Biennial University/Government/Industry Microelectronics Symposium - Proceedings | 1999年
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页码：139 / 141
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