High quality 6H- and 4H-SiC pn structures with stable electric breakdown grown by liquid phase epitaxy

被引：0
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作者：
Rendakova, S. [1 ]
Ivantsov, V. [1 ]
Dmitriev, V. [1 ]
机构：
[1] Russian Acad of Sciences, St. Petersburg, Russia
来源：
Materials Science Forum | 1998年 / 264-268卷 / pt 1期
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8
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页码：163 / 166
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