Parasitic charging of dielectric surfaces in capacitive microelectromechanical systems (MEMS)

被引：0
|
作者：
Chemnitz Univ of Technology, Chemnitz, Germany [1 ]
机构：
来源：
Sens Actuators A Phys | / 1-2卷 / 74-80期
关键词：
Number:; -; Acronym:; DFG; Sponsor: Deutsche Forschungsgemeinschaft;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
相关论文
共 50 条
  • [41] Dielectric charging process in AlN RF-MEMS capacitive switches
    Papaioannou, George J.
    Lisec, Tomas
    2007 EUROPEAN MICROWAVE INTEGRATED CIRCUITS CONFERENCE, VOLS 1 AND 2, 2007, : 241 - +
  • [42] Dielectric charging process in AlN RF-MEMS capacitive switches
    Papaioannou, George J.
    Lisec, Tomas
    2007 EUROPEAN MICROWAVE CONFERENCE, VOLS 1-4, 2007, : 1338 - +
  • [43] Microelectromechanical systems (MEMS)
    Gabriel, KJ
    1997 IEEE AEROSPACE CONFERENCE PROCEEDINGS, VOL 3, 1997, : 9 - 43
  • [44] MEMS - MICROELECTROMECHANICAL SYSTEMS
    OCONNOR, L
    MECHANICAL ENGINEERING, 1992, 114 (02) : 40 - 47
  • [45] Effect of space charge polarization in radio frequency microelectromechanical system capacitive switch dielectric charging
    Papaioannou, G. J.
    Exarchos, M.
    Theonas, V.
    Psychias, J.
    Konstantinidis, G.
    Vasilache, D.
    Muller, A.
    Neculoiu, D.
    APPLIED PHYSICS LETTERS, 2006, 89 (10)
  • [46] Capacitive RF MEMS switch dielectric charging and reliability: a critical review with recommendations
    van Spengen, W. M.
    JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2012, 22 (07)
  • [47] Assessment of Dielectric Charging in RF MEMS Capacitive Switches with the Aid of MIM Capacitors
    Michalas, L.
    Koutsoureli, M.
    Papandreou, E.
    Gantis, A.
    Papaioannou, G.
    2014 29TH INTERNATIONAL CONFERENCE ON MICROELECTRONICS PROCEEDINGS - MIEL 2014, 2014, : 125 - 128
  • [48] Modeling and characterization of dielectric-charging effects in RF MEMS capacitive switches
    Yuan, XB
    Hwang, JCM
    Forehand, D
    Goldsmith, CL
    2005 IEEE MTT-S INTERNATIONAL MICROWAVE SYMPOSIUM, VOLS 1-4, 2005, : 753 - 756
  • [49] Dielectric Charging Asymmetry in SiN Films Used in RF MEMS Capacitive Switches
    Koutsoureli, Matroni
    Michalas, Loukas
    Papandreou, Eleni
    Papaioannou, George
    IEEE TRANSACTIONS ON DEVICE AND MATERIALS RELIABILITY, 2017, 17 (01) : 138 - 145
  • [50] Future of microelectromechanical systems (MEMS)
    Fudan Univ, Shanghai, China
    Sens Actuators A Phys, 1-2 (135-141):
12345