Parasitic charging of dielectric surfaces in capacitive microelectromechanical systems (MEMS)

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Chemnitz Univ of Technology, Chemnitz, Germany [1 ]
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Sens Actuators A Phys | / 1-2卷 / 74-80期
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Number:; -; Acronym:; DFG; Sponsor: Deutsche Forschungsgemeinschaft;
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