STUDY OF ELECTRICALLY ACTIVE DEFECTS IN SILICON WAFERS WITH THE SCANNING ELECTRON MICROSCOPE.

被引：0
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作者：
Karelin, N.M.
Dusakin, S.I.
Litvinov, Yu.M.
Rau, E.I.
Spivak, G.V.
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来源：
Soviet Microelectronics (English Translation of Mikroelektronika) | 1980年 / 9卷 / 01期
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摘要：
SEMICONDUCTOR MATERIALS
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页码：26 / 30
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