Investigation of scanning electron microscope overlay metrology

被引：0
|
作者：
Koike, Toru [2 ]
Ikeda, Takahiro [2 ]
Abe, Hideaki [1 ,2 ]
Komatsu, Fumio [1 ,2 ]
机构：
[1] Manufacturing Engineering Center, Semiconductor Company, Toshiba Corporation, 8 Shinsugita-cho, Isogo-ku, Yokohama 235-8522, Japan
[2] ULSI Process Engineering Laboratory, Semiconductor Company, Toshiba Corporation, 8 Shinsugita-cho, Isogo-ku, Yokohama 235-8522, Japan
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 1999年 / 38卷 / 12 B期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：7159 / 7163
相关论文
共 50 条
  • [21] Investigation of creep microcavities by scanning electron microscope
    Devenyi, L
    Biro, T
    MATERIALS SCIENCE, TESTING AND INFORMATICS, 2003, 414-4 : 183 - 187
  • [22] OVERLAY MEASUREMENT USING THE LOW-VOLTAGE SCANNING ELECTRON-MICROSCOPE
    ROSENFIELD, MG
    STARIKOV, A
    MICROELECTRONIC ENGINEERING, 1992, 17 (1-4) : 439 - 444
  • [23] CHARGING EFFECTS IN LOW-VOLTAGE SCANNING ELECTRON-MICROSCOPE METROLOGY
    BRUNNER, M
    SCHMID, R
    SCANNING ELECTRON MICROSCOPY, 1986, 1986 : 377 - 382
  • [24] Scanning electron microscope dimensional metrology using a model-based library
    Villarrubia, JS
    Vladár, AE
    Postek, MT
    SURFACE AND INTERFACE ANALYSIS, 2005, 37 (11) : 951 - 958
  • [25] CHARGING EFFECTS IN LOW-VOLTAGE SCANNING ELECTRON MICROSCOPE METROLOGY.
    Brunner, M.
    Schmid, R.
    Scanning Electron Microscopy, 1986, (pt 2): : 377 - 382
  • [26] Sidewall effect of photomask by scanning electron microscope and optical critical dimension metrology
    Yamane, T
    Hirano, T
    JOURNAL OF MICROLITHOGRAPHY MICROFABRICATION AND MICROSYSTEMS, 2005, 4 (03):
  • [27] Metrology of multilayer Laue lens structures by means of scanning electron microscope imaging
    Jahedi, N.
    Conley, R.
    Shi, B.
    Qian, J.
    Lauer, K.
    Macrander, A.
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 2010, 616 (2-3): : 89 - 92
  • [28] INVESTIGATION OF HAIR WITH AID OF SCANNING ELECTRON-MICROSCOPE
    SCHNEIDE.V
    ZEITSCHRIFT FUR RECHTSMEDIZIN-JOURNAL OF LEGAL MEDICINE, 1972, 71 (02): : 94 - &
  • [29] Investigation of the Porosity of Sandstones by Scanning Electron Microscope.
    Gaida, Karl Heinz
    Ruehl, Walter
    Zimmerle, Winfried
    Erdoel-Erdgas-Zeitschrift, 1973, 89 (09): : 336 - 343
  • [30] SCANNING ELECTRON MICROSCOPE INVESTIGATION OF HUMAN TRABECULAR BONE
    DYSON, ED
    WHITEHOU.WJ
    HEALTH PHYSICS, 1970, 19 (01): : 158 - +
12345