Investigation of low loss and high reliability encapsulation technology in large-area, high-power semiconductor devices

被引：0
|
作者：
Morita, Toshiaki [1 ]
Kato, Mitsuo [2 ]
Onuki, Jin [3 ]
Onose, Hidekatsu [1 ]
Matsuura, Nobuyoshi [2 ]
Sakurada, Shuroku [1 ]
机构：
[1] Hitachi Research Laboratory, Hitachi Ltd., 1-1 Omika-clio 7-chome, Hitachi, Ibaraki 319-1292, Japan
[2] Semiconductor and Integrated Circuits Division, Hitachi Ltd., Ill Nishiyokote-cho, Takasaki, Gtinma 370-0021, Japan
[3] Hitachi Works, Hitachi Ltd., 1-1 Saiwai-cho 3-chome, Hitachi, Ibaraki 317-8511, Japan
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 1999年 / 38卷 / 11期
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页码：6232 / 6236
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