Structure and electrical properties of Pb(Zr,Ti)O3 thin films deposited by reactive sputtering using multi-targets

被引：0
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作者：
Cho, Neung-Ho [1 ]
Kim, Ho-Gi [1 ]
机构：
[1] Korea Advanced Inst of Science and, Technology, Taejon, Korea, Republic of
来源：
Thin Solid Films | 1995年 / 266卷 / 02期
关键词：
Crystal quality effects - Fatigue resistance - Halogen lamp - Lead zirconate titanate thin films - Mass flow controller - Multiple-target sputtering system - Reactive sputtering - Structural properties - Turbomolecular pump;
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页码：140 / 144
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