Fabrication of ultrafine x-ray mask using precise crystal growth technique

被引：0
|
作者：
Miyamoto, Yasuyuki [1 ]
Furuya, Kazuhito [1 ]
Yamazaki, Daisuke [1 ]
机构：
[1] Tokyo Inst of Technology, Tokyo, Japan
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 1992年 / 31卷 / 4 A期
关键词：
10;
D O I：
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摘要：
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页码：432 / 435
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