Surface-micromachined reconfigurable multi-slit mask

被引：0
|
作者：
Bakshi, S. [1 ]
Parameswaran, M. [1 ]
Syrzycki, M. [1 ]
Crampton, D. [2 ]
机构：
[1] School of Engineering Science, Simon Fraser University, Burnaby, BC V5A 1S6, Canada
[2] NRC, Dominion Astrophysical Observatory, Victoria, BC V8X 4M6, Canada
来源：
Canadian Journal of Electrical and Computer Engineering | 2000年 / 25卷 / 01期
关键词：
Masks - Microactuators - Micromachining - Polycrystalline materials - Silicon wafers - Stepping motors;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
The concept of an electromechanically reconfigurable multi-slit mask using a three-layer polysilicon (3-poly) surface-micromachining technology is proposed. This is a novel application of microelectromechanical systems (MEMS) to multi-object spectroscopy in the field of astronomy. The fabricated prototype device consists of a single-slit-mask, 300-μm×1.2-mm shutter along with a thermal-actuator-based stepper motor. The stepper motor has a 10-mm stroke and consumes 200 mW per cycle of operation. A flange-type guide-rail design has been incorporated in the shutter to permit linear translation along a single axis.
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页码：9 / 12
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