Surface-micromachined reconfigurable multi-slit mask

被引：0

作者：

Bakshi, S. ^{[1
]}

Parameswaran, M. ^{[1
]}

Syrzycki, M. ^{[1
]}

Crampton, D. ^{[2
]}

机构：

[1] School of Engineering Science, Simon Fraser University, Burnaby, BC V5A 1S6, Canada

[2] NRC, Dominion Astrophysical Observatory, Victoria, BC V8X 4M6, Canada

来源：

Canadian Journal of Electrical and Computer Engineering | 2000年 / 25卷 / 01期

关键词：

Masks - Microactuators - Micromachining - Polycrystalline materials - Silicon wafers - Stepping motors;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

The concept of an electromechanically reconfigurable multi-slit mask using a three-layer polysilicon (3-poly) surface-micromachining technology is proposed. This is a novel application of microelectromechanical systems (MEMS) to multi-object spectroscopy in the field of astronomy. The fabricated prototype device consists of a single-slit-mask, 300-μm×1.2-mm shutter along with a thermal-actuator-based stepper motor. The stepper motor has a 10-mm stroke and consumes 200 mW per cycle of operation. A flange-type guide-rail design has been incorporated in the shutter to permit linear translation along a single axis.

引用

页码：9 / 12

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