High force low area MEMS thermal actuator

被引：0
|
作者：
Microsoft Corp, Redmond, United States [1 ]
机构：
来源：
Thermomechanical Phenomena in Electronic Systems -Proceedings of the Intersociety Conference | 2000年 / 1卷
关键词：
Buckle beam actuator - Electrostatic actuator - Electrothermal actuator - Polysilicon - Thermal actuator;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：127 / 132
相关论文
共 50 条
  • [41] Failure mechanisms of a MEMS actuator in very high vacuum
    Patton, ST
    Zabinski, JS
    TRIBOLOGY INTERNATIONAL, 2002, 35 (06) : 373 - 379
  • [42] Low voltage, high speed and small area in-plane MEMS switch
    Bian, Wei
    Zhao, Jiahao
    You, Zheng
    JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2019, 29 (06)
  • [43] Numerical modeling of a MEMS actuator considering several magnetic force calculation methods
    Preisner, Thomas
    Bolzmacher, Christian
    Gerber, Andreas
    Bauer, Karin
    Quandt, Eckhard
    Mathis, Wolfgang
    COMPEL-THE INTERNATIONAL JOURNAL FOR COMPUTATION AND MATHEMATICS IN ELECTRICAL AND ELECTRONIC ENGINEERING, 2011, 30 (04) : 1176 - 1188
  • [44] Large-output-force out-of-plane MEMS actuator array
    Fukushige, T
    Hata, S
    Shimokohbe, A
    DEVICE AND PROCESS TECHNOLOGIES FOR MEMS, MICROELECTRONICS, AND PHOTONICS III, 2004, 5276 : 240 - 249
  • [45] RF MEMS switches based on the buckle-beam thermal actuator
    Girbau, D
    Lázaro, A
    Pradell, L
    33RD EUROPEAN MICROWAVE CONFERENCE, VOLS 1-3, CONFERENCE PROCEEDINGS, 2003, : 651 - 654
  • [46] Long Travel Range Thermal Actuator for Deeply Etched MEMS Components
    Osama, Aya
    Sabry, Yasser M.
    Khalil, Diaa
    2018 35TH NATIONAL RADIO SCIENCE CONFERENCE (NRSC), 2018, : 393 - 400
  • [47] Measurement of MEMS thermal actuator time constant using image blur
    Bschaden, Ben
    Hubbard, Ted
    Kujath, Marek
    JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2011, 21 (04)
  • [48] High-Performance Piezoresistive MEMS Strain Sensor with Low Thermal Sensitivity
    Mohammed, Ahmed A. S.
    Moussa, Walied A.
    Lou, Edmond
    SENSORS, 2011, 11 (02) : 1819 - 1846
  • [49] A High Dynamic Restoring Force Electrostatic Actuator
    Gupta, Arun K.
    Fletcher, Mark K.
    Lee, Jeong-Bong
    JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2013, 22 (05) : 1032 - 1040
  • [50] A micro electromagnetic actuator with high force density
    Wang, Yue
    Zhi, Chao
    Tang, Bin
    Yang, Kai
    Xie, Jin
    Xu, Wei
    Li, He
    Wang, Xi
    SENSORS AND ACTUATORS A-PHYSICAL, 2021, 331 (331)
12345