High force low area MEMS thermal actuator

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作者：
Microsoft Corp, Redmond, United States [1 ]
机构：
来源：
Thermomechanical Phenomena in Electronic Systems -Proceedings of the Intersociety Conference | 2000年 / 1卷
关键词：
Buckle beam actuator - Electrostatic actuator - Electrothermal actuator - Polysilicon - Thermal actuator;
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页码：127 / 132
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