Epitaxially grown aluminum film on 36°-rotated Y-cut lithium tantalate for high-power surface acoustic wave devices

被引：0

作者：

Sakurai, Atsushi ^{[1
]}

Yoshino, Yukio ^{[1
]}

Ieki, Hideharu ^{[1
]}

机构：

[1] Murata Manufacturing Co, Ltd, Nagaokakyo City, Japan

来源：

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 1994年 / 33卷 / 5 B期

关键词：

Acoustic surface wave devices;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

引用

页码：3015 / 3017

共 37 条

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[32] Fabrication technology of high-frequency and high-power durable surface acoustic wave devices for mobile terminals
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[34] TI-ADDED AL ELECTRODES ON LITAO3 36-DEGREES Y-X SUBSTRATES FOR HIGH-POWER SURFACE-ACOUSTIC-WAVE DEVICES .1.
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[36] A Full-Wave Analysis of Surface Acoustic Waves Propagating on a SiO2 Overlay/Metal Grating/Rotated Y-Cut X-Propagating LiNbO3 Substrate Structure
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[37] Ti-added Al electrodes on LiTaO3 36° Y-X substrates for high power surface acoustic wave devices I
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Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, 1993, 32 (5 B): : 2351 - 2354

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