Epitaxially grown aluminum film on 36°-rotated Y-cut lithium tantalate for high-power surface acoustic wave devices

被引：0
|
作者：
Sakurai, Atsushi [1 ]
Yoshino, Yukio [1 ]
Ieki, Hideharu [1 ]
机构：
[1] Murata Manufacturing Co, Ltd, Nagaokakyo City, Japan
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 1994年 / 33卷 / 5 B期
关键词：
Acoustic surface wave devices;
D O I：
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学科分类号：
摘要：
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页码：3015 / 3017
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