Epitaxially grown aluminum film on 36°-rotated Y-cut lithium tantalate for high-power surface acoustic wave devices

被引:0
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作者
Sakurai, Atsushi [1 ]
Yoshino, Yukio [1 ]
Ieki, Hideharu [1 ]
机构
[1] Murata Manufacturing Co, Ltd, Nagaokakyo City, Japan
关键词
Acoustic surface wave devices;
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页码:3015 / 3017
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