共 50 条
- [33] Doping and isolation of GaN, InGaN and InAlN using ion implantation SILICON CARBIDE AND RELATED MATERIALS 1995, 1996, 142 : 1023 - 1026
- [34] PASSIVATION OF HIGH-RESISTIVITY CADMIUM TELLURIDE BY HYDROGEN IMPLANTATION APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1987, 43 (01): : 47 - 52
- [35] Process Optimization for Selective Area Doping of GaN by Ion Implantation Journal of Electronic Materials, 2021, 50 : 4642 - 4649
- [36] Incorporation of deep defects in GaN induced by doping and implantation processes PHYSICA STATUS SOLIDI B-BASIC RESEARCH, 1999, 216 (01): : 587 - 591
- [37] Ion implantation of epitaxial GaN films: Damage, doping and activation NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1997, 127 : 463 - 466
- [38] Si and Mg Ion Implantation for Doping of GaN Grown on Silicon 2018 22ND INTERNATIONAL CONFERENCE ON ION IMPLANTATION TECHNOLOGY (IIT 2018), 2018, : 70 - 73