Implantation doping and hydrogen passivation of GaN

被引:0
|
作者
Burchard, A. [1 ]
Deicher, M. [1 ]
Forkel-Wirth, D. [1 ]
Haller, E.E. [1 ]
Magerle, R. [1 ]
Prospero, A. [1 ]
Stoetzler, A. [1 ]
机构
[1] Universitaet Konstanz, Konstanz, Germany
来源
Materials Science Forum | 1997年 / 258-263卷 / pt 2期
关键词
D O I
暂无
中图分类号
学科分类号
摘要
引用
收藏
页码:1099 / 1104
相关论文
共 50 条
  • [31] Hydrogen plasma passivation effects on properties of p-GaN
    Polyakov, AY
    Smirnov, NB
    Govorkov, AV
    Baik, KH
    Pearton, SJ
    Luo, B
    Ren, F
    Zavada, JM
    JOURNAL OF APPLIED PHYSICS, 2003, 94 (06) : 3960 - 3965
  • [32] P-type doping of GaN by Mg+ implantation
    Yao, SD
    Zhou, SQ
    Yang, ZJ
    Lu, YH
    Sun, CC
    Sun, C
    Zhang, GY
    Vantomme, A
    Pipeleers, B
    Zhao, Q
    CHINESE PHYSICS LETTERS, 2003, 20 (01): : 102 - 104
  • [33] Doping and isolation of GaN, InGaN and InAlN using ion implantation
    Pearton, SJ
    Vartuli, CB
    Abernathy, CR
    Mackenzie, JD
    Zolper, JC
    Yuan, C
    Stall, RA
    SILICON CARBIDE AND RELATED MATERIALS 1995, 1996, 142 : 1023 - 1026
  • [34] PASSIVATION OF HIGH-RESISTIVITY CADMIUM TELLURIDE BY HYDROGEN IMPLANTATION
    BIGLARI, B
    SAMIMI, M
    HAGEALI, M
    SIFFERT, P
    APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1987, 43 (01): : 47 - 52
  • [35] Process Optimization for Selective Area Doping of GaN by Ion Implantation
    Mona A. Ebrish
    Travis J. Anderson
    Alan G. Jacobs
    James C. Gallagher
    Jennifer K. Hite
    Michael A. Mastro
    Boris N. Feigelson
    Yekan Wang
    Michael Liao
    Mark Goorsky
    Karl D. Hobart
    Journal of Electronic Materials, 2021, 50 : 4642 - 4649
  • [36] Incorporation of deep defects in GaN induced by doping and implantation processes
    Krtschil, A
    Witte, H
    Lisker, M
    Christen, J
    Krost, A
    Birkle, U
    Einfeldt, S
    Hommel, D
    Wenzel, A
    Rauschenbach, B
    PHYSICA STATUS SOLIDI B-BASIC RESEARCH, 1999, 216 (01): : 587 - 591
  • [37] Ion implantation of epitaxial GaN films: Damage, doping and activation
    Parikh, N
    Suvkhanov, A
    Lioubtchenko, M
    Carlson, E
    Bremser, M
    Bray, D
    Davis, R
    Hunn, J
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1997, 127 : 463 - 466
  • [38] Si and Mg Ion Implantation for Doping of GaN Grown on Silicon
    Coig, M.
    Lardeau-Falcy, A.
    Sacher, N.
    Kanyandekwe, J.
    Huvelin, A.
    Biscarrat, J.
    Vilain, E.
    Milesi, F.
    Mazen, F.
    2018 22ND INTERNATIONAL CONFERENCE ON ION IMPLANTATION TECHNOLOGY (IIT 2018), 2018, : 70 - 73
  • [39] Process Optimization for Selective Area Doping of GaN by Ion Implantation
    Ebrish, Mona A.
    Anderson, Travis J.
    Jacobs, Alan G.
    Gallagher, James C.
    Hite, Jennifer K.
    Mastro, Michael A.
    Feigelson, Boris N.
    Wang, Yekan
    Liao, Michael
    Goorsky, Mark
    Hobart, Karl D.
    JOURNAL OF ELECTRONIC MATERIALS, 2021, 50 (08) : 4642 - 4649
  • [40] Passivation of the beryllium acceptor in GaN and a possible route for p-type doping
    Demchenko, Denis O.
    Reshchikov, Michael A.
    APPLIED PHYSICS LETTERS, 2021, 118 (14)