Cubic boron nitride thin film synthesis by microwave ECR plasma chemical vapor deposition

被引：0
|
作者：
Paisley, Michael [1 ]
Sitar, Zlatko [1 ]
Bourget, Larry [1 ]
Davis, Robert [1 ]
机构：
[1] North Carolina State Univ
来源：
R and D: Research and Development Kobe Steel Engineering Reports | 1992年 / 42卷 / 02期
关键词：
Boron compounds;
D O I：
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摘要：
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页码：54 / 56
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