Cubic boron nitride thin film synthesis by microwave ECR plasma chemical vapor deposition

被引：0
|
作者：
Paisley, Michael [1 ]
Sitar, Zlatko [1 ]
Bourget, Larry [1 ]
Davis, Robert [1 ]
机构：
[1] North Carolina State Univ
来源：
R and D: Research and Development Kobe Steel Engineering Reports | 1992年 / 42卷 / 02期
关键词：
Boron compounds;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：54 / 56
相关论文
共 50 条
  • [31] Controlled growth of large cubic boron nitride crystals by chemical vapor deposition
    Yu, J
    Matsumoto, S
    DIAMOND AND RELATED MATERIALS, 2003, 12 (09) : 1539 - 1543
  • [32] The synthesis of hexagonal boron nitride via chemical vapor deposition
    Yang Y.
    Wu B.
    Wang L.
    Liu Y.
    Kexue Tongbao/Chinese Science Bulletin, 2017, 62 (20): : 2195 - 2207
  • [33] NUCLEATION OF BORON-NITRIDE ON CUBIC BORON-NITRIDE MICROCRYSTALLITES USING CHEMICAL-VAPOR-DEPOSITION
    SAITOH, H
    HIROSE, T
    OHTSUKA, T
    ICHINOSE, Y
    APPLIED PHYSICS LETTERS, 1994, 64 (13) : 1638 - 1640
  • [34] Microwave plasma chemical vapor deposition synthesis of boron-doped carbon nanotube
    Watanabe, T.
    Tsuda, S.
    Yamaguchi, T.
    Takano, Y.
    PHYSICA C-SUPERCONDUCTIVITY AND ITS APPLICATIONS, 2010, 470 : S608 - S609
  • [35] Lowering of the Substrate Bias Voltage for Deposition of Cubic Boron Nitride in Microwave Plasma
    Nakakuma, T.
    Teii, K.
    Matsumoto, S.
    IEEE TRANSACTIONS ON PLASMA SCIENCE, 2019, 47 (02) : 1205 - 1209
  • [36] Deposition of cubic boron nitride in hydrogen plasma
    Konyashin, I
    Inkson, B
    Bill, J
    Aldinger, F
    Khvostov, V
    Bregadze, A
    Guseva, M
    Babaev, V
    CHEMICAL VAPOR DEPOSITION, 1998, 4 (04) : 125 - 129
  • [37] Hexagonal boron nitride grown using high atomic boron emission during microwave plasma chemical vapor deposition
    Chakrabarty, Kallol
    Arnold, Ivan
    Catledge, Shane A.
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2019, 37 (06):
  • [38] Cubic boron nitride thin film heteroepitaxy
    Feldermann, H
    Ronning, C
    Hofsäss, H
    Huang, YL
    Seibt, M
    JOURNAL OF APPLIED PHYSICS, 2001, 90 (07) : 3248 - 3254
  • [39] CUBIC BORON-NITRIDE CRYSTALLITES GROWN BY LASER-ENHANCED PLASMA CHEMICAL VAPOR-DEPOSITION
    KOMATSU, S
    MORIYOSHI, Y
    KASAMATSU, M
    YAMADA, K
    JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1991, 24 (09) : 1687 - 1690
  • [40] FORMATION AND PROPERTIES OF CUBIC BORON-NITRIDE FILMS ON TUNGSTEN CARBIDE BY PLASMA CHEMICAL VAPOR-DEPOSITION
    OKAMOATO, M
    UTSUMI, Y
    OSAKA, Y
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 1992, 31 (10): : 3455 - 3460
12345