共 50 条
- [41] Influential factors in low-temperature direct bonding of silicon dioxide 2015 INTERNATIONAL 3D SYSTEMS INTEGRATION CONFERENCE (3DIC 2015), 2015,
- [42] LOW-TEMPERATURE RESISTANCE OF THIN FILMS OF GOLD ON SILICON JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1971, 8 (01): : 261 - &
- [43] Infrared optical constants of silicon dioxide thin films by measurements of R and T JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2000, 18 (03): : 1796 - 1804
- [44] Low-temperature deposition of silicon dioxide and silicon nitride for dual Spacer application 2007 IEEE/SEMI ADVANCED SEMICONDUCTOR MANUFACTURING CONFERENCE, 2007, : 79 - +
- [47] The influence of the thermal annealing on optical properties of porous silicon films FIFTH CONFERENCE ON OPTICS (ROMOPTO '97), PTS 1 AND 2, 1998, 3405 : 205 - 210
- [48] Low-temperature properties of porous silicon-indium nanocomposite Technical Physics Letters, 2012, 38 : 789 - 792
- [50] LOW-TEMPERATURE GROWTH OF SILICON DIOXIDE FILMS - A STUDY OF CHEMICAL BONDING BY ELLIPSOMETRY AND INFRARED-SPECTROSCOPY JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1987, 5 (02): : 530 - 537