OPTICAL PRODUCTION OF LARGE AREA PATTERNS FOR MICROELECTRONICS.

被引：0
|
作者：
Milne, A.D.
Stevenson, J.T.M.
Mackie, R.D.L.
机构：
来源：
Nuclear Instruments and Methods | 1980年
关键词：
Compendex;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
LITHOGRAPHY
引用
收藏
页码：97 / 110
相关论文
共 50 条
  • [41] Optical inspection of complex patterns of microelectronics products
    You, J.
    Kim, S. -W.
    CIRP ANNALS-MANUFACTURING TECHNOLOGY, 2008, 57 (01) : 505 - 508
  • [42] PARAMETER OPTIMIZATION IN ULTRASONIC HOT WELDING OF ALUMINUM WIRES IN MICROELECTRONICS.
    Dorn, Lutz
    Florian, Wolfgang
    Jafari, Seifollah
    Schweissen und Schneiden/Welding and Cutting, 1988, 40 (03): : 45 - 46
  • [43] FRAMEWORK FOR AN INTEGRATED SET OF STANDARDS FOR IONIZING RADIATION TESTING OF MICROELECTRONICS.
    Brown, Dennis B.
    Johnston, Allan H.
    IEEE Transactions on Nuclear Science, 1987, NS-34 (06)
  • [44] LASER INTERFEROMETER MEASUREMENT SYSTEMS FOR MACHINE TOOL INDUSTRY AND MICROELECTRONICS.
    Petru, F.
    Popela, B.
    Stejskal, A.
    Krsek, J.
    Vesela, Z.
    Jakl, M.
    Revue roumaine de physique, 1985, 32 (1-2): : 227 - 233
  • [45] Polymers for microelectronics. Resists and dielectrics. ACS symposium series 537
    1600, (116):
  • [46] Tunneling currents in electron transfer reactions in proteins: Protein microelectronics.
    Stuchebrukhov, AA
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 1996, 211 : 130 - PHYS
  • [47] Large area radio frequency plasma for microelectronics processing
    Yu, Z., 1600, AVS Science and Technology Society (13):
  • [48] METALLIZATION PROBLEMS IN MICROELECTRONICS. PREPARATION OF HIGH-PURITY TUNGSTEN AND MOLYBDENUM
    Plushcheva, Svetlana V.
    METAL 2009, CONFERENCE PROCEEDINGS, 2009, : 297 - 302
  • [49] Poly(arylether)s with trifluoromethyl substituents as low-ε-dielectrics for microelectronics.
    Maier, G
    Banerjee, S
    Schneider, JM
    Hecht, R
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 1998, 216 : U61 - U61
  • [50] Fabrication and Characteristics of Al2O3 Layers for Microelectronics.
    Leimbrock, Wolfgang
    Guenther, Stefan
    Wissenschaftliche Zeitschrift - Technische Hochschule Karl-Marx-Stadt, 1979, 21 (07): : 835 - 846
12345