OPTICAL PRODUCTION OF LARGE AREA PATTERNS FOR MICROELECTRONICS.

被引：0

作者：

Milne, A.D.

Stevenson, J.T.M.

Mackie, R.D.L.

机构：

来源：

Nuclear Instruments and Methods | 1980年

关键词：

Compendex;

D O I：

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学科分类号：

摘要：

LITHOGRAPHY

引用

页码：97 / 110

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